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In the early 1980's, Thermal Circuits introduced HTB etched
foil element heaters to the Semiconductor industry to heat acid
in portable
wafer processing baths. It replaced hot plates that only heated
from the bottom. The five-sided etched foil heater wraps the corresponding
five-sided inner bath vessel with a combination of uniform and
profiled
heat. The etched foil heating process is designed to quickly bathe
boatloads of wafers and other parts.
The etched foil elements are
compatible with Thermal Circuits High Temperature Binder Inorganic
and Organic coatings and with fabrication
materials such as fiberglass cloth, fiberglass mat, mica, and
ceramic fiber insulating carriers. The HTB coatings protect and
immobilize
the elements, yet allow them to expand and contract at watt densities
two to three times greater with temperatures up to 1200° F. |
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The HTB etched foil heating construction is also used for wet
processing equipment in-line heaters. Thermal circuits recommends
electrical insulation depending upon the materials used in the
customer's product, glass, plastic, coated or uncoated stainless
steel. The use of quartz in the etched foil heater allows for a
direct mount without insulation and is preferred by designers for
high-wattage and high-temperature applications.
Although application similarities exist in the etched foil heating
technology employed in Chuck Technology Integrated Circuitry, there
are enough variables in wattage, temperature, and mounting methods
to require designers to pay special attention to combining alternative
insulations and films in order to insure the success of the end
product. For example, this heater/heat sink assembly consists of
an etched foil element encapsulated in a combination laminate of
two thin film insulators: one Kapton® polyimide, the other
Teflon®. The heater mounts to an anodized heat sink and a sensor
is located in the center pedestal. Multi-heater/heat sink assemblies
incorporate into multi-port boards designed to rapidly load/unload
for "burning in" of silicone discs used in the computer
industry. |